Run-to-Run Control in Semiconductor Manufacturing
James Moyne, Enrique del Castillo, Arnon M. Hurwitz
Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.
หมวดหมู่:
ปี:
2000
ฉบับพิมพ์ครั้งที่:
1
สำนักพิมพ์:
CRC Press
ภาษา:
english
จำนวนหน้า:
341
ISBN 10:
0849311780
ไฟล์:
PDF, 8.79 MB
IPFS:
,
english, 2000